AWB20060321:
How to create a simple “AutoLearn” Recipe?

This application note describes how to use the Automation Workbench (AWB) to create a recipe or program flow to monitor a KLARF’s folder for previously unknown spatial signatures, with an average k-NN distance less than 500 microns.

1. Pre-process KLARF data
2. Detect Scratches.
3. Output.

1. Pre-process KLARF data
2. Object Signature Recognition
3. Feature Extraction
4. Comparison to Set of Rules

DSA20060404:
Reticle Repeater Analysis and Filter

1. Reticle Repeater Analysis.
2. Reticle Repeater Filter.

DSA20060401:
How to manage libraries used in Defect Signature Analyzer.

This application note describes how to use Defect Signature Analyzer (“DSA”) to manage the following type of libraries:

1. Wafer Pattern Signature Library.
2. Object Signature Library.

IRS20060406:
Using IRS to make your defect data work for you

1. IRS OLAP (Online Analytical Processing)
2. IRS Pivot Chart
3. IRS Charting
4. IRS Reporting