IDA Enterprise Edition

IDA Enterprise Edition provides the semiconductor fab with a state-of-the-art capability to analyze defect inspection data for spatial signatures in a production environment and to make the results of the analyses available to clients throughout the fab. IDA Enterprise also supports an extensive SQL data base to support long term trend analysis of signature data. The IDA Server modules provide the full range of IDA application services and data services to client PCs, providing the user interface for the full range of IDA functions. In addition to providing the same signature analysis capability as IDA Professional, IDA Enterprise clients have real-time access to signature analysis results in the IDA data base.

	Defect Signature Analyzer (DSA™) provides the yield engineer with a wide range of analysis and visualization tools with which to develop and optimize the defect signature analysis methodology and to train the defect signature libraries.
	Automation Workbench (AWB™) that allows the engineer to automate the signature analysis methodology to run in either batch mode or continuous monitor mode. An easy-to-use graphical interface allows the user to develop custom analysis recipes that enhance signature recognition accuracy and purity.
	Intelligent Reporting System (IRS™) allows the user to process and compile the signature analysis results in that are generated by the AWB recipes. The user may view, analyze and report on the multi-dimensional process variables that are contained in the IDA data repository files.
	Real-Time Process Monitor (RPM™) allows the user to monitor events of process control recipes running in parallel. The RPM displays alarms when an Out Of control (OOC) is happening in the monitored process. The user can view the details of the event which comprise of trend charts, wafer maps, OOC conditions of recent results from the selected process monitor recipe.
	IDA Navigator (NAV™) is an IDA Enterprise application that enables a thin-client user to query the IDA data base. The user can generate reports and trend charts based on process control rules or statistical process control parameters. The user can also save trend chart as a process control recipe which can be executed in RPM.
	AWB Monitor (MON™) allows the user to launch and monitor multiple AWB recipes using a single monitor job. AWB Monitor allows the user to conveniently select any of the AWB recipes running in the job and to display the current status of that recipe.
	Signature Repository Manager (SRM™) is an administrative application that allows the user to maintain the IDA data base. It includes a data archive function and the ability to remove entries from the data base. It also provides tools for migrating data generated from IDA Professional to IDADB.
	IDA Portal (POR™) is a web-based application that connects engineers and managers across the entire fab to the signature analysis information in the IDA data base. IDA Portal can be accessed by using a standard web browser via intranet or internet.